Today’s rubber elastomer materials have unique mechanical behavior characteristics, which are highly nonlinear and strain rate-dependent. In order to accurately predict the sealing performance of these materials, Xufluo has established a special model for all our existing sealing materials.
For our semiconductor industry today, from tool design to multi-physical field coupling simulation, finite element analysis has become an important design and analysis tool.
·Sealing solutions derived from design, prototyping, production, testing and installation.
·Xufluo Sealing’s experienced engineering design team provides customers with comprehensive product design, performance optimization and analysis services.
·A failed seal is usually caused by a number of causes, such as thermal degradation, mechanical degradation, plasma chemical attack, and inherent design defects. Our team of engineers will comprehensively investigate these possible reasons, and then provide material recommendations, design upgrades, and guidance training services.
Sealing problem
An OEM manufacturer is facing a sealing problem that affects the production level. A complete set of seals is installed on a leading edge equipment for direct parallel comparison with perfluorinated products at that time. Compared perfluorinated products have unstable performance at the same time as the granularity. In addition, the sealing ring does not fit well with the groove and often falls out of the groove. As a result, the comparative perfluorinated product needs to be replaced and the output is lost, resulting in a mismatch between the planned maintenance cycle and the wafer output. Resource
Engineering Technology: Product Analysis
Xufluo Sealing conducted a comprehensive analysis of the perfluorinated products that failed at that time, so as to judge the failure form of the sealing products in each problematic part.
Our engineers perform FEA stress and deformation analysis on all designs provided to our customers to ensure sealing functionality.
By optimizing the stress distribution that can lead to stress-induced failure and chemical erosion of the elastomer, the design and material composition are strengthened to extend the life of the seal.
Solution & Successful Outcome
Xufluo solutions offer lower chamber granularity
